The OPTISTATION -V offers ergonomic design and a user-friendly operating environment. This compact-size wafer inspection system also offers high accuracy and high throughput. The wide illuminator (WIL) and line illuminator (LIL) simplify visual macro inspections of unevenness, defocus, and other items that had been difficult to observe in conventional systems. *Dual feeder arms and rotating triple arms are used in the transfer system to achieve high throughput. * A clean transfer system suppresses contamination. SMIF is supported (available as an option). * 200, 150, and φ125mm (8", 6", 5") wafers can be transferred and inspected. (φ100 mm support is available as an option.) * Confocal microscope module can be equipped as an option.