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Both surfaces are finished to perfect
flatness and in parallel. |
y observing light
wave interference fringes caused by the contact surface,
the degree of flatness and parallelism of the measurement
surfaces of measurement instruments and certain measurement
tools can be checked.
Specifications
Diameter: 30mm
Thickness: 12mm, 12.12mm, 12.25mm, 12.37mm
Flatness: within 0.1um
Parallel level: within 0.2um
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