*Four side planes of the carrier are continuously measured by rotating the kinematic plate in 90? increments
*SEMI-compliant kinematic plate provides perfect XYZ coordinates
*Variety of illumination choices facilitate accurate measurements of registration pin holes and latch-key holes
* Laser AF provides fast, non-contact measurements of wafer positions
*W ide area, high-intensity LED illumination enables accurate measurements of wafer heights 300mm, 200mm wafer carrier and SMIF Pod door